Measuring and modeling optical diffraction from subwavelength features
نویسندگان
چکیده
منابع مشابه
Measuring and modeling optical diffraction from subwavelength features
We describe a technique for studying scattering from subwavelength features. A simple scatterometer was developed to measure the scattering from the single-submicrometer, subwavelength features generated with a focused ion beam system. A model that can describe diffraction from subwavelength features with arbitrary profiles is also presented and shown to agree quite well with the experimental m...
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ژورنال
عنوان ژورنال: Journal of the Optical Society of America A
سال: 2001
ISSN: 1084-7529,1520-8532
DOI: 10.1364/josaa.18.000565